JPH01100359U - - Google Patents
Info
- Publication number
- JPH01100359U JPH01100359U JP19678087U JP19678087U JPH01100359U JP H01100359 U JPH01100359 U JP H01100359U JP 19678087 U JP19678087 U JP 19678087U JP 19678087 U JP19678087 U JP 19678087U JP H01100359 U JPH01100359 U JP H01100359U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- charged particle
- particle beam
- beam device
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19678087U JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19678087U JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01100359U true JPH01100359U (en]) | 1989-07-05 |
| JPH0517797Y2 JPH0517797Y2 (en]) | 1993-05-12 |
Family
ID=31487375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19678087U Expired - Lifetime JPH0517797Y2 (en]) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517797Y2 (en]) |
-
1987
- 1987-12-25 JP JP19678087U patent/JPH0517797Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517797Y2 (en]) | 1993-05-12 |